Precursor supplies, material processing systems with which precursor supplies are configured to be used and associated methods
US9156055B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 9, 2013 |
| Grant date | Oct 13, 2015 |
| Priority date | — |
| Expiry date | Dec 1, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/1352
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In various aspects and embodiments, the present disclosure relates to the manner in which precursor materials are provided to processing equipment and, more specifically, to the manner in which precursor materials of organic polymers are delivered to systems for forming and, in some embodiments, depositing the organic polymers. In one aspect, the disclosure relates to precursor supplies, which comprise vehicles, such as binders, supports and cartridges, for delivering a precursor material to a material processing system, such as a deposition system or other processing equipment. In another aspect, the disclosure relates to material processing systems with which the precursor supplies are configured to be used. Methods for preparing precursor supplies, using precursor supplies, providing process control, and recycling precursor supplies are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.