Patent · US Active

Shadow mask alignment using coded apertures

US9157148B2 · kind B2 · utility

0Cited by
15References
22Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMay 23, 2011
Grant dateOct 13, 2015
Priority date
Expiry dateOct 23, 2031

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC23C14/54
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

In a shadow mask-substrate alignment method, a substrate is provided that includes a grate having a plurality of spaced bars and a shadow mask is provided that includes a grate having a plurality of spaced bars. Also provided is a light source-light receiver pair that defines a path of light therebetween. The grate of the substrate and the grate of the shadow mask are caused to be positioned in the path of the light. Thereafter, the orientation of the substrate, the shadow mask, or both are caused to be adjusted to position the grate of the substrate, the grate of the shadow mask, or both until a predetermined amount of light or a predetermined range of an amount of light on the path passing through the grates is received by the light receiver.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.