Multi-vane throttle valve
US9157533B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 13, 2014 |
| Grant date | Oct 13, 2015 |
| Priority date | — |
| Expiry date | Aug 13, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87475
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A multi-vane throttling valve for a vacuum process chamber includes a reciprocal vane pivotally connected to and extending backwardly away from a back side of each of a plurality of rotatable vanes, and a stationary reciprocal vane angling assembly fixed in a predefined position and having an assembly pin extending transversely toward the reciprocal vane a predefined distance sufficient to support the reciprocal vane whereby the stationary angling assembly causes the reciprocal vane to pivot in a range between a substantially parallel position with the respective rotatable vane and a transverse position with the respective rotatable vane when the respective rotatable vane is rotated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.