Pressure measurement device having an optimized sensitivity
US9157821B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2012 |
| Grant date | Oct 13, 2015 |
| Priority date | — |
| Expiry date | Mar 2, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/053
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS and/or NEMS pressure measurement device includes a deformable membrane suspended on a substrate, one of the faces of the membrane configured to be subjected to a pressure to be measured, a detector configured to detect deformation of the membrane and being provided at least partly on the substrate; and a non-deformable transmission device configured to transmit the deformation of the membrane to the detector, said transmission device rotatably hinged to the substrate about an axis substantially parallel to the plane of the membrane and being provided facing another face of the membrane opposite to said one of the faces, such that at least beyond a given pressure said transmission device and the membrane are movably integral with each other, and such that the transmission device transmits to the detector, in an amplified manner, the deformation or the stress from the deformation of the membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.