Method and apparatus for characterizing objects and monitoring manufacturing processes
US9157876B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2012 |
| Grant date | Oct 13, 2015 |
| Priority date | — |
| Expiry date | Mar 30, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/01
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of characterizing an object includes determining a depth-wise composition of the object at a measurement site within the object. A property of the object within a region adjacent to the measurement site can, optionally, be estimated based on the determining. Another method of characterizing an object includes disposing at least a portion of an object within a measurement region of a metrology tool, aligning a feature of the object and a location of a designated measurement site within the measurement region relative to each other, and performing a performing a compositional analysis of a portion of the object occupying the measurement site. Various apparatus for performing these methods are also disclosed, as are methods of monitoring manufacturing processes based on these methods.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.