Patent · US Active

Microelectronic device testing apparatus and method

US9157928B2 · kind B2 · utility

1Cited by

7References

14Claims

0Family size

Assignee

Analog Devices, Inc. · US

Inventors

Wei Chen · Shanghai, CN
Huy Khanh Tang · Westford, US

Key dates

Filing date	Mar 19, 2012
Grant date	Oct 13, 2015
Priority date	—
Expiry date	Nov 5, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG01M7/045
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A microelectronic device tester has a mounting member (for mounting a device), a drive shaft connected to the mounting member, and a vibration shaft mechanically in communication with the drive shaft. The drive shaft and vibration shaft are non-coaxial, and the drive shaft has a drive shaft proximal end and a drive shaft distal end. The drive shaft proximal end is connected to the mounting member, and the drive shaft distal end terminates proximal of the entire vibration shaft.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.