Carbosilane polymer compositions for anti-reflective coatings
US9158195B2 · kind B2 · utility
1Cited by
5References
2Claims
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Key dates
| Filing date | May 5, 2014 |
| Grant date | Oct 13, 2015 |
| Priority date | — |
| Expiry date | May 5, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02118
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A silicon polymer material, which has a silicon polymer backbone with chromophore groups attached directly to at least a part of the silicon atoms, the polymer further exhibiting carbosilane bonds. The film forming composition and resulting coating properties can be tailored to suit the specific exposure wavelength and device fabrication and design requirements. By using two different chromophores the refractive index and the absorption co-efficient can be efficiently tuned. By varying the proportion of carbosilane bonds, and a desired Si-content of the anti-reflective coating composition can be obtained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.