Enhanced photon detection device with biased deep trench isolation
US9160949B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 1, 2013 |
| Grant date | Oct 13, 2015 |
| Priority date | — |
| Expiry date | Apr 1, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F77/959
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A photon detection device includes a photodiode having a planar junction disposed in a first region of semiconductor material. A deep trench isolation (DTI) structure is disposed in the semiconductor material. The DTI structure isolates the first region of the semiconductor material on one side of the DTI structure from a second region of the semiconductor material on an other side of the DTI structure. The DTI structure includes a dielectric layer lining an inside surface of the DTI structure and doped semiconductor material disposed over the dielectric layer inside the DTI structure. The doped semiconductor material disposed inside the DTI structure is coupled to a bias voltage to isolate the photodiode in the first region of the semiconductor material from the second region of the semiconductor material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.