Patent · US Active

Method for producing microparticles

US9162518B2 · kind B2 · utility

1Cited by
4References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 13, 2012
Grant dateOct 20, 2015
Priority date
Expiry dateAug 6, 2033

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB01J2219/00722
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

Silicon microcarriers suitable for fluorescent assays as a well as a method of producing such microcarriers are provided. The method includes the steps of providing a SOI wafer having a bottom layer of monocristalline silicone, an insulator layer and a bottom layer of monocristalline silicon, delineating microparticles, etching away the insulator layer and then depositing an oxide layer on the wafer still holding the microparticles before finally lifting-off the microparticles.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.