Method for producing microparticles
US9162518B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 13, 2012 |
| Grant date | Oct 20, 2015 |
| Priority date | — |
| Expiry date | Aug 6, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/00722
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Silicon microcarriers suitable for fluorescent assays as a well as a method of producing such microcarriers are provided. The method includes the steps of providing a SOI wafer having a bottom layer of monocristalline silicone, an insulator layer and a bottom layer of monocristalline silicon, delineating microparticles, etching away the insulator layer and then depositing an oxide layer on the wafer still holding the microparticles before finally lifting-off the microparticles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.