Patent · US Active

Micromechanical rotary acceleration sensor and method for detecting a rotary acceleration

US9164123B2 · kind B2 · utility

0Cited by

7References

19Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Reinhard Neul · Stuttgart, DE
Torsten Ohms · Lambach, DE
Mirko Hattass · Stuttgart, DE
Daniel Christoph Meisel · Pittsburgh, US

Key dates

Filing date	Apr 23, 2012
Grant date	Oct 20, 2015
Priority date	—
Expiry date	Mar 30, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG01P15/097
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The disclosure relates to a micromechanical rotary acceleration sensor including a substrate with at least one anchoring device and at least two flywheel masses. At least one of the flywheel masses is connected to at least one anchoring device by means of a coupling element. The at least one anchoring device is designed in such a manner that the at least two flywheel masses are elastically deflectable from a respective rest position about at least one axis of rotation. The at least two flywheel masses is designed in such a manner that they have different natural frequencies.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.