Recipe management apparatus and recipe management method
US9165091B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 13, 2013 |
| Grant date | Oct 20, 2015 |
| Priority date | — |
| Expiry date | May 8, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
According to one embodiment, a recipe management apparatus for comparing recipes prescribing process conditions of processing apparatuses between a plurality of the processing apparatuses having the same type. The recipe management apparatus includes a recipe reading unit, a mask unit, and a determination unit. The recipe reading unit is configured to read binary-format recipes of the plurality of processing apparatuses. The mask unit is configured to apply masks to data of the recipes based on mask position information prescribing positions which are applied with the masks in binary-format data of the recipes. The determination unit is configured to compare the plurality of recipes applied with the masks, and configured to determine whether there is a difference.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.