Aluminum dopant compositions, delivery package and method of use
US9165773B2 · kind B2 · utility
7Cited by
7References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 27, 2014 |
| Grant date | Oct 20, 2015 |
| Priority date | — |
| Expiry date | Jun 14, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/88054
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A novel method and system for using aluminum dopant compositions is provided. A composition of the aluminum dopant compositions is selected with sufficient vapor pressure and minimal carbon content, thereby enabling ease of delivery to an ion implant process and substantial reduction of carbon deposition during Al ion implantation. The source material is preferably stored and delivered from a sub-atmospheric storage and delivery device to enhance safety and reliability during the Al ion implantation process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.