Patent · US Active

Stabilization structure including sacrificial release layer and staging cavity

US9166114B2 · kind B2 · utility

141Cited by

54References

20Claims

0Family size

Assignee

LuxVue Technology Corporation · US

Inventors

Hsin-Hua Hu · Los Altos, US
Andreas Bibl · Los Altos, US

Key dates

Filing date	Jan 30, 2013
Grant date	Oct 20, 2015
Priority date	—
Expiry date	Jan 30, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH10H29/14
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A method and structure for stabilizing an array of micro devices is disclosed. The array of micro devices is held within an array of staging cavities on a carrier substrate. Each micro device is laterally surrounded by sidewalls of a corresponding staging cavity.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.