Tunable cavity resonator including a plurality of MEMS beams
US9166271B2 · kind B2 · utility
1Cited by
0References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2013 |
| Grant date | Oct 20, 2015 |
| Priority date | — |
| Expiry date | Jun 5, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P7/065
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.