Biaxial linear-motion micro drive apparatus
US9168623B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 13, 2011 |
| Grant date | Oct 27, 2015 |
| Priority date | — |
| Expiry date | Jun 23, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/18992
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A biaxial linear-motion micro drive apparatus includes: a mounting base A on an upper surface of a Z-direction sliding base; a Z-direction micro actuator fixed within the mounting base A and connected with a Z-direction micro-motion platform connected with an X-direction sliding base; Z-direction guide rail strips arranged on the Z-direction sliding; two Z-direction guide rail blocks provided on one Z-direction guide rail strip fixedly mounted on a lower surface of the X-direction sliding base; a mounting base B provided on an upper surface of the X-direction sliding base; an X-direction micro actuator in the mounting base B and connected with an X-direction micro-motion platform connected with an XZ biaxial motion platform; two X-direction guide rail strips arranged on the upper surface of the X-direction sliding base; two X-direction guide rail blocks provided on each X-direction guide rail strip mounted on a lower surface of the XZ biaxial motion platform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.