Electromechanical transducer element, method of manufacturing the same, liquid droplet discharge head, and liquid droplet discharge device
US9168744B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 12, 2014 |
| Grant date | Oct 27, 2015 |
| Priority date | — |
| Expiry date | Sep 12, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An electromechanical transducer element includes a substrate; a first electrode formed on the substrate as a common electrode; an electromechanical transducer membrane formed on the first electrode; a second electrode formed on the electromechanical transducer membrane as an individual electrode; a first insulation protection membrane formed on the first and the second electrode; a third electrode electrically connected to the first electrode; a fourth electrode electrically connected to the second electrode; a second insulation protection membrane including a common electrode pad formed on the third electrode and plural individual electrode pads formed on the fourth electrode; and a fifth electrode formed so as to surround a vicinity of at least one of the individual electrode pads disposed at end parts.Further, the fifth electrode is formed on the first insulation protection membrane and is electrically connected to the first electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.