3D inspection using cameras and projectors with multiple-line patterns
US9170207B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 25, 2011 |
| Grant date | Oct 27, 2015 |
| Priority date | — |
| Expiry date | Apr 22, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/308
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An installation of optical inspection of integrated circuits or the like includes a photographic system placed above a scene in a plane defined by a first and a second direction, the photographic system having several digital cameras each having an orthogonal array of pixels, all cameras having their respective optical axes inclined by a first angle with respect to a third direction perpendicular to the two others; and two projectors of determined patterns, these patterns being such that two straight lines projected by each of the projectors are aligned in the plane defined by the first two directions and are coplanar with a straight line interconnecting the optical centers of the two projectors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.