Inertial sensor and method for measuring acceleration using the same
US9170270B2 · kind B2 · utility
2Cited by
2References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 5, 2012 |
| Grant date | Oct 27, 2015 |
| Priority date | — |
| Expiry date | Apr 19, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/084
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed herein is an inertial sensor, including: a membrane; a mass body disposed under the membrane; a sensing unit formed on the membrane and including a piezoelectric body; and a spring constant control unit formed to be spaced apart from the sensing unit and including a piezoelectric body. According to the preferred embodiment of the present invention, the DC acceleration (in particular, gravity acceleration) can be measured by using the change in the spring constant without changing the structure of the inertial sensor including the piezoelectric material of the prior art.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.