Accelerometer and its fabrication technique
US9170271B2 · kind B2 · utility
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4References
14Claims
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Key dates
| Filing date | Sep 19, 2013 |
| Grant date | Oct 27, 2015 |
| Priority date | — |
| Expiry date | Sep 19, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0871
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An accelerometer has E-shaped resilient beams to isolate stress and reduce deformation. A top cap silicon wafer and a bottom cap silicon wafer are both coupled with a measurement mass to form a capacitor. The measurement mass has a mass, range-of-motion stops, and resilient beams located within a support frame. The range-of-motion stops are coupled to the support frame by connection beams, and the mass is coupled with the range-of-motion stops by groups of E-shaped resilient beams. The ends of each resilient beam are connected to the range-of-motion stops, and the middle of each resilient beam is connected to the mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.