Cassette adapter, adapter main body locking apparatus and seating sensor mechanism
US9171748B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2011 |
| Grant date | Oct 27, 2015 |
| Priority date | — |
| Expiry date | Jun 5, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67775
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A cassette adapter which makes it possible for a second cassette which accommodates a circular wafer of a diameter of 200 mm to be used on a load port ready for a first cassette which accommodates a different circular wafer of another diameter of 300 mm is locked to the load port by an adapter main body locking apparatus. The locking apparatus includes a locking air cylinder serving as a locking member for locking the first cassette to a carrier base of the load port, and a locking target member provided integrally on a rear face of an adapter plate of the cassette adapter for disengageably engaging with a locking pawl at an end of a rod of the air cylinder. A seating sensor mechanism detects that the second cassette is seated at a correct position on the adapter plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.