Purge nozzle unit, purge apparatus and load port
US9174253B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 8, 2013 |
| Grant date | Nov 3, 2015 |
| Priority date | — |
| Expiry date | May 10, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67775
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A purge nozzle unit 1 includes a nozzle main body 2 including a trunk 41 and a collar section 8 protruding outward from the trunk 41 and a holder 3 including a side wall 31 that is in slidable contact with an outward face of the collar section 8 and a bottom wall 33 having a through hole 32 with which an outward face of the trunk 41 is in slidable contact and is configured such that a vent 30 in communication with the outside is formed in the holder 3 and the nozzle main body 2 is vertically moved relative to the holder 3 by regulating a pressure in a pressure-regulated space S formed between the nozzle main body 2 and the holder 3 and in communication with the vent 30.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.