Multilayer heterostructures and their manufacture
US9175397B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2011 |
| Grant date | Nov 3, 2015 |
| Priority date | — |
| Expiry date | Nov 28, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05D2350/60
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of synthesizing multilayer heterostructures including an inorganic oxide layer residing on a solid substrate is described. Exemplary embodiments include producing an inorganic oxide layer on a solid substrate by a liquid coating process under relatively mild conditions. The relatively mild conditions include temperatures below 225° C. and pressures above 9.4 mb. In an exemplary embodiment, a solution of diethyl aluminum ethoxide in anhydrous diglyme is applied to a flexible solid substrate by slot-die coating at ambient atmospheric pressure, and the diglyme removed by evaporation. An AlOx layer is formed by subjecting material remaining on the solid substrate to a relatively mild oven temperature of approximately 150° C. The resulting AlOx layer exhibits relatively high light transmittance and relatively low vapor transmission rates for water. An exemplary embodiment of a flexible solid substrate is polyethylene napthalate (PEN). The PEN is not substantially adversely affected by exposure to 150° C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.