Patent · US Active

Substrate and target plate

US9176030B2 · kind B2 · utility

4Cited by

0References

25Claims

0Family size

Assignee

SONY DADC AUSTRIA AG · AT

Inventors

Ivan Lucic · Wien, AT
Peter Hausberger · Radfeld, AT
Werner Balika · Anif, AT
Christian Poeschl · Neumarkt am Wallersee, AT

Key dates

Filing date	Mar 20, 2009
Grant date	Nov 3, 2015
Priority date	—
Expiry date	Jan 30, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/24479
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A substrate is provided, which comprises a structured surface including a regular pattern of a plurality of elevated structures that are elevated with respect to a nominal surface of the substrate, wherein at least two dimensions are between 1 nm and 100 μm, the structured surface being configured to stimulate smooth crystallization of microcrystals or to boost hydrophobic properties. A target plate comprising a plurality of substrates is disclosed as well.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.