Micro-optical element, micro-optical array, and optical sensor system

US9176051B2 · kind B2 · utility

Assignee

• KARLSRUHER INSTITUT FÜR TECHNOLOGIE · DE

Inventors

• Timo Mappes · Karlsruhe, DE
• Heinz Kalt · Blankenloch, DE
• Tobias Grossmann · Darmstadt, DE
• Torsten Beck · Stuttgart, DE
• Tobias Wienhold · Karlsruhe, DE
• Marko Brammer · Esslingen am Neckar, DE

Key dates

• Filing date: Jun 23, 2012
• Grant date: Nov 3, 2015
• Expiry date: Jun 23, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2201/0873
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micro-optical element includes a resonator substrate, at least one microresonator includes a rotationally symmetrical body mounted on the resonator substrate, and a light-reflecting element including a ring-shaped mirror that surrounds the rotationally symmetrical body.