Method and arrangement for displacement

US9176391B2 · kind B2 · utility

Assignee

• Heidelberg Instruments Mikrotechnik GMBH · DE

Inventors

• Michael Fangerau · Leimen, DE
• Alexander Mangold · Ludwigshafen, DE
• Roland Kaplan · Heidelberg, DE

Key dates

• Filing date: Mar 10, 2009
• Grant date: Nov 3, 2015
• Expiry date: Mar 10, 2029

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/0875
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method and apparatus operable for displacing an image, which is transmitted by electromagnetic radiation, perpendicular to the direction of radiation by use of a rotatably disposed radiation-refracting body, located in the path of an imaging beam, having a refractive index that differs from the surrounding medium with regard to the radiation used. The method allows for precise image displacement. The rotation of the radiation-refracting body causing the displacement is measured, and the change of the optical path length caused by the angular change in a further electromagnetic beam utilized for the measurement is determined by evaluating the superimposition of the radiation reflected by a planar reflecting surface with the incident electromagnetic radiation. Part of the electromagnetic measurement beam, which is reflected on the surface of the radiation-refracting body, strikes a measurement unit, which supplies an electrical signal as a function of the incident position of the electromagnetic radiation.