Ion gate method and apparatus
US9177770B2 · kind B2 · utility
2Cited by
10References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 19, 2010 |
| Grant date | Nov 3, 2015 |
| Priority date | — |
| Expiry date | Feb 11, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49227
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention generally relates to systems and methods for transmitting beams of charged particles, and in particular to such systems and methods that employ defecting at least one set of grid elements into the same plane to form an ion gate. In addition, an operation method of closing a gate involving alternating voltages on the adjacent gate wires is described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.