Gas sensor and manufacturing method thereof
US9178032B2 · kind B2 · utility
5Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 24, 2014 |
| Grant date | Nov 3, 2015 |
| Priority date | — |
| Expiry date | Jan 24, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/128
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a gas sensor including a substrate, a sensing electrode extended in a first direction on the substrate, and a plurality of heaters disposed in a second direction crossing the first direction on the substrate. The plurality of heaters is separated at both sides of the sensing electrode. The plurality of heaters includes graphene.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.