Patent · US Active

Deposition of patterned organic thin films

US9178184B2 · kind B2 · utility

8Cited by

30References

34Claims

0Family size

Assignee

UNIVERSAL DISPLAY CORPORATION · US

Inventors

Gregory McGraw · Yardley, US
Paul E. Burrows · Chattaroy, US
Siddharth Harikrishna Mohan · Plainsboro, US

Key dates

Filing date	May 17, 2013
Grant date	Nov 3, 2015
Priority date	—
Expiry date	Jul 11, 2033

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02E10/549
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Embodiments disclosed herein provide devices having a nozzle die with one or more nozzles, each of which has one or more integrated skimmers. The use of an integrated nozzle/skimmer structure allows for higher-resolution printing in OVJP-type deposition techniques without requiring the use of a shadow mask by allowing for a relatively narrow organic material beam that can be placed at relatively high distances away from the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.