Imaging device, inspection apparatus, and method of manufacturing electronic device
US9182273B2 · kind B2 · utility
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1References
12Claims
0Family size
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Key dates
| Filing date | Aug 20, 2013 |
| Grant date | Nov 10, 2015 |
| Priority date | — |
| Expiry date | Apr 3, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The imaging device includes a sensor substrate, a light-blocking substrate, a light-collecting substrate, a sealing material, and a light-transmitting member. The light-transmitting member includes a light-transmitting base disposed to be in contact with either the sensor substrate or the light-blocking substrate, and a light-transmitting resin which is filled between the base and the sensor substrate or the light-blocking substrate. A void is formed in at least a part of a space between the sealing material and the light-transmitting member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.