Optical metrology system for spectral imaging of a sample
US9182351B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 26, 2013 |
| Grant date | Nov 10, 2015 |
| Priority date | — |
| Expiry date | Jan 22, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/1053
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and scattered light from a line across the width of a sample. The metrology device includes a first light source that produces a first illumination line on the sample. A scanning system may be used to scan an illumination spot across the sample to form the illumination line. A detector spectrally images the photoluminescence light emitted along the illumination line. Additionally, a broadband illumination source may be used to produce a second illumination line on the sample, where the detector spectrally images specular reflection of the broadband illumination along the second illumination line. The detector may also image scattered light from the first illumination line. The illumination lines may be scanned across the sample so that all positions on the sample may be measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.