Ion source having negatively biased extractor
US9184019B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Mar 14, 2013 |
| Grant date | Nov 10, 2015 |
| Priority date | — |
| Expiry date | Oct 8, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/024
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion source for use in a radiation generator includes an active cathode configured to emit electrons on a trajectory away from the active cathode, at least some of the electrons as they travel interacting with an ionizable gas to produce ions. In addition, there is at least one extractor downstream of the active cathode having a potential such that the ions are attracted toward the at least one extractor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.