Patent · US Active

Modular-construction vacuum-coating system

US9186694B2 · kind B2 · utility

0Cited by

2References

6Claims

0Family size

Assignee

VON ARDENNE GMBH · DE

Inventors

Matthias Smolke · Leipzig, DE
Matthias Klooss · Dresden, DE
Andrej Wolf · Dresden, DE
Johannes Struempfel · Dresden, DE

Key dates

Filing date	Jun 14, 2011
Grant date	Nov 17, 2015
Priority date	—
Expiry date	Jun 14, 2031

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/568
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay involved in supplying media, a functional chamber, as a first submodule, is arranged in a first module and provided with an outer interface which is the same for at least a second module.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.