Non-contacting conveyance equipment
US9187256B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 24, 2012 |
| Grant date | Nov 17, 2015 |
| Priority date | — |
| Expiry date | Aug 24, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68728
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Non-contacting conveyance equipment for conveying a plate-like member in a non-contacting manner comprises a plate-like base body and a plurality of swirl flow-forming bodies provided at the base body. Each of the plurality of swirl flow-forming bodies includes a column-shaped main body, a cylindrical chamber formed inside the main body, that has an opening at one end, a flat end face formed at a surface of the main body, in which the cylindrical chamber is opened, a jetting port provided at an inner circumferential surface of the cylindrical chamber, a fluid introduction port provided at an outer circumferential surface of the main body, and a fluid passage that connects the fluid introduction port to the jetting port.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.