Apparatus and method for calibrating extreme ultraviolet spectrometer
US9188484B2 · kind B2 · utility
1Cited by
1References
9Claims
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Key dates
| Filing date | Mar 26, 2014 |
| Grant date | Nov 17, 2015 |
| Priority date | — |
| Expiry date | Mar 26, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70616
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided are an apparatus and method for calibrating an extreme ultraviolet (EUV) spectrometer in which a wavelength of a spectrum of EUV light used for EUV lithography and mask inspection technology can be measured accurately.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.