Power spectrum analysis for defect screening in integrated circuit devices
US9188622B1 · kind B1 · utility
5Cited by
6References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2011 |
| Grant date | Nov 17, 2015 |
| Priority date | — |
| Expiry date | Nov 23, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device sample is screened for defects using its power spectrum in response to a dynamic stimulus. The device sample receives a time-varying electrical signal. The power spectrum of the device sample is measured at one of the pins of the device sample. A defect in the device sample can be identified based on results of comparing the power spectrum with one or more power spectra of the device that have a known defect status.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.