Flow node to deliver process gas using a remote pressure measurement device
US9188989B1 · kind B1 · utility
23Cited by
8References
13Claims
0Family size
Inventors
Key dates
| Filing date | Aug 20, 2012 |
| Grant date | Nov 17, 2015 |
| Priority date | — |
| Expiry date | Aug 3, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0641
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A flow node includes characterized restrictor in series and adjacent with the valve seat to provide a primary flow restriction with a minimized volume between the two. A conductance of the characterized restrictor is low enough relative to the valve seat to cause a pressure drop that is sufficiently large relative to the pressure drop across the valve seat that a pressure measurement device is located upstream of the valve seat and poppet assembly is used to determine the pressure to the inlet of the restrictor. A vent can be included to reduce bleed time. Multiple flow nodes in parallel increase a dynamic range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.