Thin film thermoelectric devices having favorable crystal tilt

US9190592B2 · kind B2 · utility

Assignee

• Nextreme Thermal Solutions, Inc. · US

Inventors

• Robert P. Vaudo · New Milford, US
• Philip A. Deane · Durham, US
• Thomas Peter Schneider · Apex, US
• Christopher D. Holzworth · Morrisville, US
• Joseph R. Williamson · Chesterfield, US

Key dates

• Filing date: Mar 15, 2013
• Grant date: Nov 17, 2015
• Expiry date: May 30, 2033

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N10/17

Abstract

A method of fabricating a thermoelectric device includes providing a substrate having a plurality of inclined growth surfaces protruding from a surface thereof. Respective thermoelectric material layers are grown on the inclined growth surfaces, and the respective thermoelectric material layers coalesce to collectively define a continuous thermoelectric film. A surface of the thermoelectric film opposite the surface of the substrate may be substantially planar, and a crystallographic orientation of the thermoelectric film may be tilted at an angle of about 45 degrees or less relative to a direction along a thickness thereof. Related devices and fabrication methods are also discussed.