PDMS imprinting stamp with embedded flexure
US9193199B2 · kind B2 · utility
2Cited by
4References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 17, 2014 |
| Grant date | Nov 24, 2015 |
| Priority date | — |
| Expiry date | Feb 17, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29C2059/023
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A non-deformable patterned template includes a stable mesh, wherein the stable mesh is resistant to deformation; a polymer sheet with the stable mesh embedded therein, wherein the polymer sheet is formed using a liquid polymer adapted to receive the stable mesh, and wherein the liquid polymer is cured after the stable mesh has been placed within the liquid polymer; and a surface pattern on at least one face of the polymer sheet.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.