Tris(dialkylamide)aluminum compound, and method for producing aluminum-containing thin film using same
US9194041B2 · kind B2 · utility
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1Claims
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Key dates
| Filing date | Nov 1, 2012 |
| Grant date | Nov 24, 2015 |
| Priority date | — |
| Expiry date | Nov 1, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4482
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention relates to a tris(dialkylamide)aluminum compound, and a method for producing an aluminum-containing thin film using the aluminum compound, the tris(dialkylamide)aluminum compound being represented by the formula (1):wherein
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.