Probe card and manufacturing method thereof
US9194889B2 · kind B2 · utility
1Cited by
9References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2011 |
| Grant date | Nov 24, 2015 |
| Priority date | — |
| Expiry date | Mar 8, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49126
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a probe card including a plurality of unit plates including pad areas and contact probe areas, a plurality of electrode pads formed in the pad areas, a plurality of contact probes formed in the contact probe areas, and a plurality of interconnecting layers electrically connecting the electrode pads and the contact probes. The plurality of unit plates has different sizes and are arranged and laminated so as to expose all the pad areas of each unit plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.