In-line type film forming apparatus and method for manufacturing magnetic recording medium
US9196284B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 15, 2010 |
| Grant date | Nov 24, 2015 |
| Priority date | — |
| Expiry date | Mar 25, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67751
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
There is provided an in-line type film-forming apparatus that can prevent a substrate from being dropped out of a carrier and convey the carrier at high speed. A first supporting member (41) is supported to be displaceable in a direction along an attaching face (S1) of the support base (40) in accordance with the growth of the first supporting member (41) due to thermal expansion in a horizontal direction, a second supporting member (42) is supported to be displaceable in a direction negating the growth of the first supporting member (41) due to thermal expansion in the horizontal direction along an attaching face (S2) of the first supporting member (42) in accordance with the growth of the second supporting member (42) due to thermal expansion in the horizontal direction, and a holder (3) is supported to be displaceable in a direction negating the growth of the first and second supporting members (41) and (42) due to thermal expansion in the vertical direction along an attaching face (S3) of the third supporting member (43) in accordance with the growth of the holder (3) due to thermal expansion in the vertical direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.