Electromechanical transducer, droplet ejection head, and method for manufacturing electromechanical transducer
US9196821B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 2, 2014 |
| Grant date | Nov 24, 2015 |
| Priority date | — |
| Expiry date | Jul 2, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An electromechanical transducer includes a first electrode mounted on one of a substrate and a base film, an electromechanical transducer film mounted on the first electrode and made of a piezoelectric substance having a perovskite crystal structure, and a second electrode mounted on the electromechanical transducer film. The electromechanical transducer film includes a {100} plane preferentially oriented to be orthogonal to a thickness direction of the electromechanical transducer film and has a full width at half maximum corresponding to a {200} plane in an X-ray diffraction measurement curve in 2θ-ω scan that is measured by emitting an X-ray beam onto a surface of the electromechanical transducer film at an incident angle θ. The full width at half maximum is not greater than 10 degrees.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.