Method of fabricating a single-piece micromechanical component including at least two distinct functional levels
US9197183B2 · kind B2 · utility
1Cited by
6References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 10, 2014 |
| Grant date | Nov 24, 2015 |
| Priority date | — |
| Expiry date | Jun 19, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention relates to a method of fabricating a single-piece micromechanical component including at least two distinct functional levels. According to the invention, the method includes a LIGA process on a single level combined with the machining of the LIGA deposition directly on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.