Alkoxyaminosilane compounds and applications thereof

US9200167B2 · kind B2 · utility

Assignee

• AIR PRODUCTS AND CHEMICALS, INC. · US

Inventors

• Daniel P. Spence · Carlsbad, US
• Ronald Martin Pearlstein · San Marcos, US
• Xinjian Lei · Vista, US
• Manchao Xiao · San Diego, US
• Richard Ho · Anaheim, US
• Mark Leonard O'Neill · San Marcos, US
• Haripin Chandra · Tempe, US

Key dates

• Filing date: Jan 18, 2013
• Grant date: Dec 1, 2015
• Expiry date: Oct 7, 2033

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C07F7/188
• WIPO field: Organic fine chemistry
• WIPO sector: Chemistry

Abstract

Alkoxyaminosilane compounds having formula I, and processes and compositions for depositing a silicon-containing film, are described herein:(R1R2)NSiR3OR4OR5  Formula (I)wherein R1 is independently selected from a linear or branched C1 to C10 alkyl group; a C2 to C12 alkenyl group; a C2 to C12 alkynyl group; a C4 to C10 cyclic alkyl group; and a C6 to C10 aryl group; R2 and R3 are each independently selected from hydrogen; a linear or branched C1 to C10 alkyl group; a C3 to C12 alkenyl group, a C3 to C12 alkynyl group, a C4 to C10 cyclic alkyl group, and a C6 to C10 aryl group; and R4 and R5 are each independently selected from a linear or branched C1 to C10 alkyl group; a C2 to C12 alkenyl group; a C2 to C12 alkynyl group; a C4 to C10 cyclic alkyl group; and a C6 to C10 aryl group.