Patent · US Active

Single-axis flexure bearing configurations

US9200689B2 · kind B2 · utility

3Cited by

11References

35Claims

0Family size

Assignee

THE REGENTS OF THE UNIVERSITY OF MICHIGAN · US

Inventors

Shorya Awtar · Ann Arbor, US
Siddharth Sood · Ventura, US
Mohammad Olfatnia · Ann Arbor, US

Key dates

Filing date	Aug 15, 2012
Grant date	Dec 1, 2015
Priority date	—
Expiry date	Aug 13, 2034

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2201/033
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

Flexure bearing systems and configurations guide translational motion along a single-axis in micro and macro applications such as micro-electro-mechanical system (MEMS) devices including sensors and actuators like electrostatic comb-drive actuators. The flexure bearing systems and configurations described herein provide an improved constraint against movement (i.e., stiffness) of the primary mover in non-motion axes such as a bearing axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.