Article edge inspection
US9201019B2 · kind B2 · utility
4Cited by
57References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 3, 2013 |
| Grant date | Dec 1, 2015 |
| Priority date | — |
| Expiry date | Jan 9, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/061
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided herein is an apparatus, including a photon emitting means for emitting photons onto surface edges of an article, a photon detecting means for detecting photons scattered from particles on the surface edges of the article, and a mapping means for mapping a particle or a defect of the surface of the article.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.