Two-dimensional electrostatic scanner with distributed springs
US9201239B1 · kind B1 · utility
2Cited by
5References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 7, 2014 |
| Grant date | Dec 1, 2015 |
| Priority date | — |
| Expiry date | Apr 22, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A two-dimensional electrostatic scanner with distributed springs is disclosed. The two-dimensional electrostatic scanner comprises a frame, a mirror, one or more first-directional comb drives, two or more second-directional comb drives, four or more first-directional springs, and two or more second-directional springs. The four or more first-directional springs may connect to different electrical voltage source or electrical ground.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.