Tuning method for microresonators and microresonators made thereby
US9203134B1 · kind B1 · utility
7Cited by
20References
37Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2013 |
| Grant date | Dec 1, 2015 |
| Priority date | — |
| Expiry date | Oct 18, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/0478
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.