Patent · US Active

Micromechanical component having a damping device

US9206033B2 · kind B2 · utility

0Cited by

0References

11Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Christoph Gauger · Balingen, DE
Markus Heitz · Tübingen, DE

Key dates

Filing date	May 24, 2012
Grant date	Dec 8, 2015
Priority date	—
Expiry date	Dec 11, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0857
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical component including a mass structure which may be deflected with respect to a substrate with the aid of at least one spiral spring in a direction of deflection. The spiral spring includes at least one folding section, which is formed by two spring legs which are situated essentially in parallel to each other and are connected to each other with the aid of a connecting bar. A damping device for oscillating movements of the folding section in the direction of deflection is provided in the area of the connecting bar.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.