Test handler that rapidly transforms temperature and method of testing semiconductor device using the same
US9207272B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 13, 2013 |
| Grant date | Dec 8, 2015 |
| Priority date | — |
| Expiry date | Mar 1, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2874
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A test handler and a test method of a semiconductor device using the same includes a plurality of chambers to provide a sealed inner space accommodating a first tray on which semiconductor devices are mounted, a test module electrically connected to the semiconductor devices in the chambers to perform a test process of the semiconductor devices, and a sort part to load and unload the first tray in the chambers and to sort semiconductor devices determined to be failed in the test process. The plurality of chambers have a fluid path circulating a coolant or a heat medium in the walls so that a temperature of the plurality of chambers is rapidly changed at the test process of the semiconductor devices between a first temperature that is less than room temperature and a second temperature that is greater than room temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.